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Proceedings Paper

Fault detection in gray-value images of surfaces on different scales
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Paper Abstract

The idea of scaled topometry is to organize systematically different optical measurement techniques with overlapping ranges of resolution in order to receive highly resolved surface information in a wide range of scales. In such a surface inspection system, measurements on different scales of resolution have to be combined by a discrimination algorithm which should be sensitive on faults independent on the scale of resolution. Starting from a global measurement with low resolution certain critical areas have to be detected in which a refined measurements has to be performed. This process of detection and refinement has to be repeated on different scales. The task of the discrimination algorithm should be the detection of critical structures and the determination of the necessary order of refinement in the resolution. For the reason of scale- independence a classical approach using the surface roughness is not suitable.

Paper Details

Date Published: 13 August 1999
PDF: 8 pages
Proc. SPIE 3744, Interferometry '99: Techniques and Technologies, (13 August 1999); doi: 10.1117/12.357701
Show Author Affiliations
Daniel Kayser, Bremer Institut fuer Angewandte Strahltechnik (Germany)
Thorsten Bothe, Bremer Institut fuer Angewandte Strahltechnik (Germany)
Wolfgang Osten, Bremer Institut fuer Angewandte Strahltechnik (Germany)

Published in SPIE Proceedings Vol. 3744:
Interferometry '99: Techniques and Technologies
Malgorzata Kujawinska; Mitsuo Takeda, Editor(s)

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