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Proceedings Paper

Measurement considerations for precise highly reflective surfaces using a phase-measuring Fizeau interferometer
Author(s): Katherine Creath
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Paper Abstract

Stringent surface specifications for highly reflective precision optical surfaces place great demands on interferometric techniques used for surface metrology. Highly reflective test surfaces often produce nonsinusoidal interference fringes when compared to a partially- reflective/absorbing reference surface in Fizeau-type interferometers. This talk will discuss some tradeoffs in choosing phase-measurement techniques for use with noticeably nonsinusoidal fringes when the residual measurement error needs to be on the order of one-hundredth of a wave peak-to-valley. The errors due to the phase calculation algorithm, the phase shift calibration and the reference surface calibration are all coupled making the choices more difficult. Simulated data will be used for most of the discussion. Comparisons to the measurement of uncoated surfaces will be made.

Paper Details

Date Published: 19 July 1999
PDF: 2 pages
Proc. SPIE 3749, 18th Congress of the International Commission for Optics, (19 July 1999); doi: 10.1117/12.355068
Show Author Affiliations
Katherine Creath, Optineering (United States)

Published in SPIE Proceedings Vol. 3749:
18th Congress of the International Commission for Optics
Alexander J. Glass; Joseph W. Goodman; Milton Chang; Arthur H. Guenther; Toshimitsu Asakura, Editor(s)

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