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Proceedings Paper

Fabrication of refractive microlens with coding gray-tone mask
Author(s): Jun Yao; Jingqin Su; Yixiao Zhang; Fuhua Gao; Hui Wei; Yongkang Guo
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Paper Abstract

The fabrication of refractive microlens by introducing the melting process with coding gray-tone mask is reported. The applied mask is obtained by the coding method, nonlinear effects in intensity distribution through the gray-tone mask have been taken into account to correct the mask design. A continuous relief is formed in photoresist after exposing, and then the excellent surface shape microlens can be gained by melting. The technical parameters of this process are also presented. Results are presented for experiments and evaluated by profile meter and scanning electronic microscope. The fabrication technology of refractive microlens by this process is simple and it indicates the enormous potential to extend the fabrication range ofrefractive microlens.

Paper Details

Date Published: 19 July 1999
PDF: 2 pages
Proc. SPIE 3749, 18th Congress of the International Commission for Optics, (19 July 1999); doi: 10.1117/12.354999
Show Author Affiliations
Jun Yao, Sichuan Univ. (United Kingdom)
Jingqin Su, Sichuan Univ. (China)
Yixiao Zhang, Sichuan Univ. (China)
Fuhua Gao, Sichuan Univ. (China)
Hui Wei, Sichuan Univ. (China)
Yongkang Guo, Sichuan Univ. (China)

Published in SPIE Proceedings Vol. 3749:
18th Congress of the International Commission for Optics
Alexander J. Glass; Joseph W. Goodman; Milton Chang; Arthur H. Guenther; Toshimitsu Asakura, Editor(s)

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