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Proceedings Paper

Retrace error for the measurement of a long-radius optic
Author(s): Sen Han; Erik Novak
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Paper Abstract

The error caused by nonzero fringe pattern in a phase shifting interferometer is `harmful' to testing a long radius optic. In this paper, with the help of a concept of retrace error the error is analyzed through the combination of experiments with simulated calculations, and more sensitive elements are found in system alignment, so that the effect of the misalignment of optical elements on the retrace error is reduced to minimum.

Paper Details

Date Published: 19 July 1999
PDF: 2 pages
Proc. SPIE 3749, 18th Congress of the International Commission for Optics, (19 July 1999); doi: 10.1117/12.354906
Show Author Affiliations
Sen Han, Veeco Process Metrology (United States)
Erik Novak, Veeco Process Metrology (United States)

Published in SPIE Proceedings Vol. 3749:
18th Congress of the International Commission for Optics
Alexander J. Glass; Joseph W. Goodman; Milton Chang; Arthur H. Guenther; Toshimitsu Asakura, Editor(s)

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