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Proceedings Paper

Limitations of the confocal imaging algorithm in surface profiling
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Paper Abstract

Based on the capability of confocal microscopy to profile rough surfaces, Quartel and Sheppard have proposed an algorithm to reconstruct surface profiles from scattering data. We determine the range of applicability of the algorithm by investigating the effects of the roughness and correlation length of a random surface on the reconstruction.

Paper Details

Date Published: 19 July 1999
PDF: 2 pages
Proc. SPIE 3749, 18th Congress of the International Commission for Optics, (19 July 1999); doi: 10.1117/12.354848
Show Author Affiliations
J. Felix Aguilar, Univ. of Sydney (Mexico)
Colin J. R. Sheppard, Univ. of Sydney (Australia)

Published in SPIE Proceedings Vol. 3749:
18th Congress of the International Commission for Optics
Alexander J. Glass; Joseph W. Goodman; Milton Chang; Arthur H. Guenther; Toshimitsu Asakura, Editor(s)

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