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Proceedings Paper

Miniaturized time-scanning Fourier transform spectrometer using an electrostatic actuator
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Paper Abstract

In this paper we present a miniaturized Fourier Transform spectrometer based on a Michelson interferometer with a scanning mirror. The motion of the mirror is carried out by a new type of electrostatic comb drive actuator. The displacement of the mirror is linear with the applied voltage. Experimental results are presented.

Paper Details

Date Published: 19 July 1999
PDF: 3 pages
Proc. SPIE 3749, 18th Congress of the International Commission for Optics, (19 July 1999); doi: 10.1117/12.354842
Show Author Affiliations
Omar Manzardo, Univ. of Neuchatel (Switzerland)
Cornel Marxer, Univ. of Neuchatel (Liechtenstein)
Hans Peter Herzig, Univ. of Neuchatel (Switzerland)


Published in SPIE Proceedings Vol. 3749:
18th Congress of the International Commission for Optics
Alexander J. Glass; Joseph W. Goodman; Milton Chang; Arthur H. Guenther; Toshimitsu Asakura, Editor(s)

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