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Proceedings Paper

Phase-shifting interferometer for distance measurement using a tunable external-cavity laser diode
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Paper Abstract

A phase-shifting interferometer with a tunable external- cavity laser diode for distance measurement has been constructed. The interference phase is shifted equally in four steps by varying the source wavelength. The distance is obtained by measuring the phase shift with Carre technique from four intensities. The experimental results shows a measurement range from 40 micrometers to 13 mm.

Paper Details

Date Published: 19 July 1999
PDF: 2 pages
Proc. SPIE 3749, 18th Congress of the International Commission for Optics, (19 July 1999); doi: 10.1117/12.354823
Show Author Affiliations
Yukihiro Ishii, Univ. of Industrial Technology (Japan)
Ribun Onodera, Univ. of Industrial Technology (Japan)
Takeshi Takahashi, Univ. of Industrial Technology (Japan)

Published in SPIE Proceedings Vol. 3749:
18th Congress of the International Commission for Optics
Alexander J. Glass; Joseph W. Goodman; Milton Chang; Arthur H. Guenther; Toshimitsu Asakura, Editor(s)

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