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Proceedings Paper

Grazing incidence interferometry with the help of diffractive masters
Author(s): Johannes Schwider; Sven Brinkmann; Roland Schreiner; Thomas Dresel
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Paper Abstract

The test of rod-like technical objects can be carried out in grazing incident using diffractive optical elements as beam splitters and at the same time as generators for master wave fronts. The occurring interference patterns can be evaluated with the help of the well known phase shifting technique. Wave aberrations caused by the adjustment state of the test sample can be removed from the data set via least squares fitting a functional representing the wave aberrations due to misalignments.

Paper Details

Date Published: 19 July 1999
PDF: 2 pages
Proc. SPIE 3749, 18th Congress of the International Commission for Optics, (19 July 1999); doi: 10.1117/12.354753
Show Author Affiliations
Johannes Schwider, Univ. Erlangen-Nuernberg (Germany)
Sven Brinkmann, Univ. Erlangen-Nuernberg (Germany)
Roland Schreiner, Univ. Erlangen-Nuernberg (Germany)
Thomas Dresel, Univ. Erlangen-Nuernberg (Germany)

Published in SPIE Proceedings Vol. 3749:
18th Congress of the International Commission for Optics
Alexander J. Glass; Joseph W. Goodman; Milton Chang; Arthur H. Guenther; Toshimitsu Asakura, Editor(s)

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