Share Email Print

Proceedings Paper

Optimization of a mix-and-match fab: noninteger nonconcentric field overlay
Author(s): Mark E. Notarfrancesco; Paul T. Herrington; Joseph Pelligrini
Format Member Price Non-Member Price
PDF $17.00 $21.00

Paper Abstract

Existing techniques have been characterized to align a given Nikon Body 7 exposure field to a larger Nikon Body 9 exposure field where the underlying Body 9 printed field area can be a non-integer multiple of the Body 7 printed field area. The enhancement of these techniques has been centered mostly upon the sampling plans of the Nikon alignment algorithms and the registration measurement sampling plans. Software provided by New Vision Systems has provided a cursory look into the performance of the technique used. This non-concentric phenomenon has been explored in several recent technical papers. Most previous works limited their analysis to integer non-concentric matching. Our study discusses a real manufacturing situation in a mature fab using the more flexible and economical technique of fractional field matching. On one particular device with not all the layers being interchangeable between Body 7 and Body 9 models, the non-concentric process decreased the number of exposure fields by 17.9 percent over the concentric process at the cost of additional overlay error. This additional error is not yet fully characterized, however can be between a 25-100 percent increase over the concentric process.

Paper Details

Date Published: 26 July 1999
PDF: 11 pages
Proc. SPIE 3679, Optical Microlithography XII, (26 July 1999); doi: 10.1117/12.354321
Show Author Affiliations
Mark E. Notarfrancesco, Intel Corp. (United States)
Paul T. Herrington, Intel Corp. (United States)
Joseph Pelligrini, New Vision Systems (United States)

Published in SPIE Proceedings Vol. 3679:
Optical Microlithography XII
Luc Van den Hove, Editor(s)

© SPIE. Terms of Use
Back to Top
Sign in to read the full article
Create a free SPIE account to get access to
premium articles and original research
Forgot your username?