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Proceedings Paper

Design of compliant mechanisms: applications to MEMS
Author(s): Sridhar Kota
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Paper Abstract

Compliant mechanisms are monolithic mechanical structures that rely on elastic deformation to generate sophisticated mechanical functions. This paper presents an overview of mathematical procedures employed for designing compliant mechanisms. The paper outlines: (1) topological synthesis-- which involves generation of a functional design in the form of a feasible topology starting from input/output force/motion specifications, and (2) size and shape optimization--to meet performance requirements. Some examples of compliant MEMS are also presented.

Paper Details

Date Published: 20 July 1999
PDF: 10 pages
Proc. SPIE 3673, Smart Structures and Materials 1999: Smart Electronics and MEMS, (20 July 1999); doi: 10.1117/12.354294
Show Author Affiliations
Sridhar Kota, Univ. of Michigan (United States)

Published in SPIE Proceedings Vol. 3673:
Smart Structures and Materials 1999: Smart Electronics and MEMS
Vijay K. Varadan, Editor(s)

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