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Proceedings Paper

Multiregime MEMS sensor networks for smart structures
Author(s): Stephen C. Jacobsen; Brian J. Maclean; Mark R. Whittaker; Marc Olivier; Mike G. Mladejovsky
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Paper Abstract

This paper discusses sensor IC design and packaging approaches, sensor networks architecture and communication protocols, as well as current and future applications of a series of transducers which we have developed in order to address several of the unmet needs of sensing and closed loop control of smart structures and organism-like machines of the future. In particular, the approach described therein has been used to design and manufacture sensors tailored for the measurement of strain, rotation, displacement, pressure, vibration, flow, multi-axis fluid shear, multi-axis strain, tough, multi-axis acceleration, and sound. This paper describes a suite of networkable sensors designed to monitor the internal state of the system, such as strain and joint angle, as well as that of the environment and contact interface with the system, such as pressure, shear stress and contact forces and moments.

Paper Details

Date Published: 20 July 1999
PDF: 14 pages
Proc. SPIE 3673, Smart Structures and Materials 1999: Smart Electronics and MEMS, (20 July 1999); doi: 10.1117/12.354280
Show Author Affiliations
Stephen C. Jacobsen, Sarcos Research Corp. (United States)
Brian J. Maclean, Sarcos Research Corp. (United States)
Mark R. Whittaker, Sarcos Research Corp. (United States)
Marc Olivier, Sarcos Research Corp. (United States)
Mike G. Mladejovsky, Univ. of Utah (United States)


Published in SPIE Proceedings Vol. 3673:
Smart Structures and Materials 1999: Smart Electronics and MEMS
Vijay K. Varadan, Editor(s)

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