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Proceedings Paper

Analysis of coupled diaphragms using coupled-mode theory
Author(s): Ananth Selvarajan; Talabuttala Srinivas; S. K. Anand
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Paper Abstract

Diaphragm pressure sensors based on silicon micro-machining have advantages of small size and integrability with control electronics to form efficient MEMS applications. In this paper analysis of diaphragm based pressure sensors are presented by deriving the displacement function. Governing equations for individual diaphragms are given followed by analysis of a systems of two coupled diaphragms. Coupled mode theory is used to analyze the two diaphragm pressure sensor by expanding the combined mode fields in terms of individual modes of the single diaphragms. Results are presented for typical diaphragm parameters. Results indicate that coupled diaphragm sensors can be more efficient than single diaphragm sensors.

Paper Details

Date Published: 20 July 1999
PDF: 7 pages
Proc. SPIE 3673, Smart Structures and Materials 1999: Smart Electronics and MEMS, (20 July 1999); doi: 10.1117/12.354274
Show Author Affiliations
Ananth Selvarajan, Indian Institute of Science/Bangalore (India)
Talabuttala Srinivas, Indian Institute of Science/Bangalore (India)
S. K. Anand, Indian Institute of Science/Bangalore (India)


Published in SPIE Proceedings Vol. 3673:
Smart Structures and Materials 1999: Smart Electronics and MEMS
Vijay K. Varadan, Editor(s)

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