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Proceedings Paper

Two-input axis angular rate sensor
Author(s): Seungdo An; K.Y. Park; Yong-Soo Oh; Ci Moo Song
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Paper Abstract

The surface micromachining process realized the dual-axis micro gyroscope. The 7.5 um-thick polysilicon layer deposited by LPCVD is used for the resonating structure. In this research, we report a new angularly actuated structure which detects the two-input angular rates simultaneously. One-chip is cheaper and smaller than using two gyro chips orthogonally-configured for the detection of two-input axis angular rate.

Paper Details

Date Published: 20 July 1999
PDF: 11 pages
Proc. SPIE 3673, Smart Structures and Materials 1999: Smart Electronics and MEMS, (20 July 1999); doi: 10.1117/12.354272
Show Author Affiliations
Seungdo An, Samsung Advanced Institute of Technology (South Korea)
K.Y. Park, Samsung Electro-Mechanics Company (South Korea)
Yong-Soo Oh, Samsung Advanced Institute of Technology (South Korea)
Ci Moo Song, Samsung Advanced Institute of Technology (South Korea)


Published in SPIE Proceedings Vol. 3673:
Smart Structures and Materials 1999: Smart Electronics and MEMS
Vijay K. Varadan, Editor(s)

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