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Proceedings Paper

Polysilicon surface micromachined optical rotating sensor
Author(s): Ludi Zheng; Anand Krishna Asundi; Ai Qun Liu; Franck Alexis Chollet
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Paper Abstract

This paper presents a new design of micromachined optical rotating sensor (ORS). The concept demonstration prototype shows that the sensor will be low cost, small and reliable. To obtain a micro ORS, a ring resonator was designed, based on the three-layer polysilicon surface micromachining process. The ring resonator is made up of three micro mirrors and a laser diode coated with an anti-reflective coating. The micro ORS relies on the Sagnac effect for its operation. The resolution analysis and sensor design is presented here, and the signal processing and control system design is discussed. The theoretical resolution is in the range of 1 - 6 deg/h.

Paper Details

Date Published: 20 July 1999
PDF: 8 pages
Proc. SPIE 3673, Smart Structures and Materials 1999: Smart Electronics and MEMS, (20 July 1999); doi: 10.1117/12.354270
Show Author Affiliations
Ludi Zheng, Nanyang Technological Univ. (Singapore)
Anand Krishna Asundi, Nanyang Technological Univ. (Singapore)
Ai Qun Liu, National Univ. of Singapore (Singapore)
Franck Alexis Chollet, National Univ. of Singapore (Singapore)


Published in SPIE Proceedings Vol. 3673:
Smart Structures and Materials 1999: Smart Electronics and MEMS
Vijay K. Varadan, Editor(s)

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