The values of the basic characteristics of surface roughness measured by means of optical and non-optical methods often differ mutually. So far a systematic comparison of the results obtained by those methods has not been done. The results we have achieved comparing optical and non-optical methods of the surface roughness measurement for selected samples of rough surfaces and for selected methods are presented.

Date Published: 14 July 1999
PDF: 12 pages
Proc. SPIE 3820, 11th Slovak-Czech-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics, (14 July 1999); doi: 10.1117/12.353100

Published in SPIE Proceedings Vol. 3820:
11th Slovak-Czech-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics
Miroslav Hrabovsky; Anton Strba; Waclaw Urbanczyk, Editor(s)