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Proceedings Paper

High-power ultraviolet all-solid-state laser for industrial applications
Author(s): Christoph Mehlmann; Thomas Schroeder; Peter Klopp; R. Koch; Uwe Stamm; Dirk Basting
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Paper Abstract

A diode-pumped laser system is described operating at 1 Hz-7 kHz repetition frequency. Average powers of more than 5 W at 355 nm are achieved. With it is beam quality of M2 better than 1.1 it is excellently suitable for micro- machining applications generating smaller spot sizes with rather simple imaging system. Laser parameters such as pulse duration, average power as well as energy stability are investigated. Long term test results above 4.0 X 1010 shots are presented.

Paper Details

Date Published: 15 July 1999
PDF: 7 pages
Proc. SPIE 3618, Laser Applications in Microelectronic and Optoelectronic Manufacturing IV, (15 July 1999); doi: 10.1117/12.352701
Show Author Affiliations
Christoph Mehlmann, Lambda Physik GmbH (Germany)
Thomas Schroeder, Lambda Physik GmbH (Germany)
Peter Klopp, Lambda Physik GmbH (Germany)
R. Koch, Lambda Physik GmbH (Germany)
Uwe Stamm, Lambda Physik GmbH (Germany)
Dirk Basting, Lambda Physik, Inc. (United States)

Published in SPIE Proceedings Vol. 3618:
Laser Applications in Microelectronic and Optoelectronic Manufacturing IV
Jan J. Dubowski; Henry Helvajian; Ernst-Wolfgang Kreutz; Koji Sugioka, Editor(s)

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