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Proceedings Paper

Semiconductor laser array fabricated by Nd:YAG laser-induced quantum well intermixing
Author(s): Jan J. Dubowski; G. Marshall; Yan Feng; Philip J. Poole; Charles Lacelle; Joan E. Haysom; N. Sylvain Charbonneau; Margaret Buchanan
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Paper Abstract

Selective area CW Nd:YAG laser annealing of GaInAsP/InP quantum well (QW) structures has been investigated as a possible route towards the fabrication of monolithically integrated photonic circuits. Laser irradiation of a 5 QW laser structure, originally designed to yield lasers emitting at 1.5 micrometers , yielded material having a continuously changing band-gap ranging from 1.5 to 1.38 micrometers over the distance of about 3 mm. Bars with arrays of broad area lasers, having lengths from 300 to 600 micrometers , were fabricated form the processed materials. An individual bar comprised lasers operating typically between 1.4 and 1.5 micrometers . The lasers showed stable threshold current density and quantum efficiency as function of the operating wavelength. This demonstration indicates that the applied technology has the potential to realize the cost-effective fabrication of advanced photonic devices and photonic integrated circuits.

Paper Details

Date Published: 15 July 1999
PDF: 7 pages
Proc. SPIE 3618, Laser Applications in Microelectronic and Optoelectronic Manufacturing IV, (15 July 1999); doi: 10.1117/12.352683
Show Author Affiliations
Jan J. Dubowski, National Research Council Canada (Canada)
G. Marshall, National Research Council Canada (Canada)
Yan Feng, National Research Council Canada (Canada)
Philip J. Poole, National Research Council Canada (Canada)
Charles Lacelle, National Research Council Canada (Canada)
Joan E. Haysom, National Research Council Canada (Canada)
N. Sylvain Charbonneau, National Research Council Canada (Canada)
Margaret Buchanan, National Research Council Canada (Canada)

Published in SPIE Proceedings Vol. 3618:
Laser Applications in Microelectronic and Optoelectronic Manufacturing IV
Jan J. Dubowski; Henry Helvajian; Ernst-Wolfgang Kreutz; Koji Sugioka, Editor(s)

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