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Proceedings Paper

Recent progress of obliquely deposited thin films for industrial applications
Author(s): Motofumi Suzuki; Tadayoshi Itoh; Yasunori Taga
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Paper Abstract

More than 10 years ago, birefringent films of metal oxides were formed by oblique vapor deposition and investigated with a view of their application to optical retardation plates. The retardation function of the films was explained in terms of the birefringence caused by the characteristic anisotropic nanostructure inside the films. These films are now classified in the genre of the so-called sculptured thin films. However, the birefringent films thus prepared are not yet industrialized even now due to the crucial lack of the durability and the yield of products. In this review paper, we describe the present status of application process of the retardation films to the information systems such as compact disc and digital versatile disc devices with a special emphasis on the uniformity of retardation properties in a large area and the stability of the optical properties of the obliquely deposited thin films. Finally, further challenges for wide application of the obliquely deposited thin films are also discussed.

Paper Details

Date Published: 30 June 1999
PDF: 12 pages
Proc. SPIE 3790, Engineered Nanostructural Films and Materials, (30 June 1999); doi: 10.1117/12.351241
Show Author Affiliations
Motofumi Suzuki, Toyota Central Research and Development Labs., Inc. (Japan)
Tadayoshi Itoh, Toyota Central Research and Development Labs., Inc. (Japan)
Yasunori Taga, Toyota Central Research and Development Labs., Inc. (Japan)

Published in SPIE Proceedings Vol. 3790:
Engineered Nanostructural Films and Materials
Akhlesh Lakhtakia; Russell F. Messier, Editor(s)

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