Share Email Print

Proceedings Paper

Electron emission from a glass surface subjected to an intensive electron beam
Author(s): Anatoly M. Filachev; Boris I. Fouks; Dmitrii E. Greenfield
Format Member Price Non-Member Price
PDF $17.00 $21.00

Paper Abstract

Electron-beam processing of insulating materials faces some difficulties connected with electric charge accumulation during electron irradiation. In this paper investigation of charging dynamics of glasses subjected to electron beam, is presented. It was found that secondary emission from the surface is not the only way of excess charge vanishing in some insulating materials. Under certain circumstances, strong electric field of introduced charge may result in intensive hot electron emission from the surface. This emission, in turn, leads to this charge rapid disappearing. This mechanism prevents such insulators from charging under the electron beam irradiation and facilitates processing them significantly. Main features of emission of this kind are discussed.

Paper Details

Date Published: 10 June 1999
PDF: 9 pages
Proc. SPIE 3819, International Conference on Photoelectronics and Night Vision Devices, (10 June 1999); doi: 10.1117/12.350905
Show Author Affiliations
Anatoly M. Filachev, ORION Research, Development, and Production Ctr. (Russia)
Boris I. Fouks, Institute of Radio Engineering and Electronics (Russia)
Dmitrii E. Greenfield, Scientific and Research Institute of Electron and Ion Optics (Russia)

Published in SPIE Proceedings Vol. 3819:
International Conference on Photoelectronics and Night Vision Devices
Anatoly M. Filachev, Editor(s)

© SPIE. Terms of Use
Back to Top
Sign in to read the full article
Create a free SPIE account to get access to
premium articles and original research
Forgot your username?