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Proceedings Paper

Secondary electron spectroscopy for microanalysis and defect review
Author(s): David C. Joy; Neeraj Khanna; David Braski
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Paper Abstract

Secondary electron spectra have been obtained from a variety of materials under vacuum conditions similar to those encountered in a conventional scanning electron microscope. Although secondary emission is restricted to the near surface region of a sample, and so would be expected to be affected by the presence of a film of contamination, it is shown that the modifications to the secondary electron spectrum are generally minor in nature and do not make it impossible to associate the spectrum with the underlying material. Secondary electron spectroscopy may provide a method to add a materials classification category to defect review.

Paper Details

Date Published: 14 June 1999
PDF: 8 pages
Proc. SPIE 3677, Metrology, Inspection, and Process Control for Microlithography XIII, (14 June 1999); doi: 10.1117/12.350849
Show Author Affiliations
David C. Joy, Univ. of Tennessee/Knoxville and Oak Ridge National Lab. (United States)
Neeraj Khanna, Univ. of Tennessee/Knoxville (United States)
David Braski, Oak Ridge National Lab. (United States)

Published in SPIE Proceedings Vol. 3677:
Metrology, Inspection, and Process Control for Microlithography XIII
Bhanwar Singh, Editor(s)

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