Proceedings Paper
Algorithm for controlling objective lens temperature| Format | Member Price | Non-Member Price |
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Paper Abstract
An algorithm for controlling DSW objective lens temperature is discussed in this paper. By applying a fuzzy control algorithm on the basis of PID control algorithm, we specify different P, I, and D values according to different ranges of temperature and different temperature tendencies. As a result, we gain high precision of temperature control.
Paper Details
Date Published: 14 June 1999
PDF: 5 pages
Proc. SPIE 3677, Metrology, Inspection, and Process Control for Microlithography XIII, (14 June 1999); doi: 10.1117/12.350825
Published in SPIE Proceedings Vol. 3677:
Metrology, Inspection, and Process Control for Microlithography XIII
Bhanwar Singh, Editor(s)
PDF: 5 pages
Proc. SPIE 3677, Metrology, Inspection, and Process Control for Microlithography XIII, (14 June 1999); doi: 10.1117/12.350825
Show Author Affiliations
Weiming Chen, Institute of Optics and Electronics (China)
Chao He, Institute of Optics and Electronics (China)
Chao He, Institute of Optics and Electronics (China)
Yeyi Liu, Institute of Optics and Electronics (China)
Published in SPIE Proceedings Vol. 3677:
Metrology, Inspection, and Process Control for Microlithography XIII
Bhanwar Singh, Editor(s)
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