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Proceedings Paper

Performance impact of novel polymeric dyes in photoresist applications
Author(s): Ping-Hung Lu; Salem Mehtsun; John P. Sagan; Jianhui Shan; Eleazar Gonzalez; Shuji Ding; Dinesh N. Khanna
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Paper Abstract

Dye compounds are commonly used in photoresists as a low cost and effective way to control swing and/or standing wave effect caused by thin film interference as well as reflective notching by reflective light from highly reflective substrate and topography. Convention dyes are typically a monomeric compound with high absorptivity at the wavelength of exposure light and compatible with the resist system selected. Because of the monomeric nature, conventional dyes are relatively low in molecular weight hence their thermal stability and sublimination propensity has always been an issue of concern. We recently synthesize several highly thermal stable diazotized polymeric dyes. Their thermal properties as well as compatibility with resist system were investigated. The impact of polymeric dyes on the resists lithographic performance, swing reduction and reflective notching control are discussed.

Paper Details

Date Published: 11 June 1999
PDF: 11 pages
Proc. SPIE 3678, Advances in Resist Technology and Processing XVI, (11 June 1999); doi: 10.1117/12.350175
Show Author Affiliations
Ping-Hung Lu, Clariant Corp. (United States)
Salem Mehtsun, Clariant Corp. (United States)
John P. Sagan, Clariant Corp. (United States)
Jianhui Shan, Clariant Corp. (United States)
Eleazar Gonzalez, Clariant Corp. (United States)
Shuji Ding, Clariant Corp. (United States)
Dinesh N. Khanna, Clariant Corp. (United States)

Published in SPIE Proceedings Vol. 3678:
Advances in Resist Technology and Processing XVI
Will Conley, Editor(s)

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