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Proceedings Paper

Color filter array for CCD and CMOS image sensors using a chemically amplified thermally cured pre-dyed positive-tone photoresist for 365-nm lithography
Author(s): Harris R. Miller
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Paper Abstract

'On-chip' color filters are commonly used to convert monochromatic, solid-state image sensor into color sensors because they offer a good compromise between cost and resolution for digital cameras. The color filters are fabricated directly onto the surface of the CMOS or CCD image sensors, which generates a mosaic array of pixel-size filter elements. Diazonaphthoquinone-novolak photoresist is used to produce these filters by successively depositing and patterning each color layer. The choice of colors can vary from additive to subtractive or combinations of both.

Paper Details

Date Published: 11 June 1999
PDF: 8 pages
Proc. SPIE 3678, Advances in Resist Technology and Processing XVI, (11 June 1999); doi: 10.1117/12.350159
Show Author Affiliations
Harris R. Miller, Digital Optics Corp. (United States)

Published in SPIE Proceedings Vol. 3678:
Advances in Resist Technology and Processing XVI
Will Conley, Editor(s)

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