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Proceedings Paper

MEMS device systems design and verification tools for smart structures
Author(s): Ying Xu; Patrick B. Chu; Hee Jung Lee; Mary Ann Perez-Maher
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Paper Abstract

Integration of smart materials and control circuitry with MEMS devices to form smart structures is becoming an important technology. With the development of smart microsystems, integrated design tools become a growing need. We have developed a CAD tool suite for integrated MEMS and ICs, which can help MEMS designers shorten design and validation time. This suite enables both accurate device design and systems design by providing 3D analysis tools as well as system level design tools inspired by VLSI CAD. This integrated MEMS CAD tool suite aids in implementing mixed-technology designs in multi signal and energy domains. Our MEMS CAD tools include: (1) physical design, (2) mixed-domain FEA enabling device analysis, (3) schematic design entry and system level behavioral simulation, (4) macromodel extraction, (5) placement and routing synthesis tools, and (6) layout extraction and DRC verification tools. The strength of our IC- enabled MEMS design suite is that it allows recursive simulation and verification between device level and system level design, which is very important for smart structures and sensory systems that require a lot of IC control circuitry. Examples of microtransducers design in smart structure applications are provided to demonstrate the design tools. Discussion of the merit and limitations of our tools are also included.

Paper Details

Date Published: 28 May 1999
PDF: 7 pages
Proc. SPIE 3669, Smart Structures and Materials 1999: Electroactive Polymer Actuators and Devices, (28 May 1999); doi: 10.1117/12.349693
Show Author Affiliations
Ying Xu, Tanner Research, Inc. (United States)
Patrick B. Chu, Tanner Research, Inc. (United States)
Hee Jung Lee, Tanner Research, Inc. (France)
Mary Ann Perez-Maher, Tanner Research, Inc. (United States)

Published in SPIE Proceedings Vol. 3669:
Smart Structures and Materials 1999: Electroactive Polymer Actuators and Devices
Yoseph Bar-Cohen, Editor(s)

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