For many applications such as lithography and material processing it is important to generate a specific laser irradiance profile. In this paper we discuss design, fabrication, and testing considerations for three beam shapers. These beam shapers transform a 632.8 nm Gaussian intensity profile beam into a square, circle, and ring flat top irradiance profiles. The designs were tailored to minimize the usual sensitivity to fabrication errors. Simulation and empirical results are presented showing very good uniformity in the flat top beams. Other possible beam shapes are presented as well as design performance improvements with analog profile diffractive surface relief structures made with gray scale masks. The issues and difficulties of designing and fabricating UV beam shapers are also discussed.

Date Published: 1 June 1999
PDF: 10 pages
Proc. SPIE 3633, Diffractive and Holographic Technologies, Systems, and Spatial Light Modulators VI, (1 June 1999); doi: 10.1117/12.349341

Published in SPIE Proceedings Vol. 3633:
Diffractive and Holographic Technologies, Systems, and Spatial Light Modulators VI
Ivan Cindrich; Sing H. Lee; Richard L. Sutherland, Editor(s)