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Proceedings Paper

Equipment for noncontacted measuring of the form by objects with diffuse scattering surfaces
Author(s): Tamara Gundel; Friedrich Zollner
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Paper Abstract

For the flatness inspection of scattering surface light contouring can be advantageously applied with accuracies ranging from micrometers to millimeters.1 In these cases the information about the shape of object are obtamed by phase measurement of a projected fring system as a function of space coordinates. By means of the phasestep methodZ the phase measurements can be performed with high accuracy.

Paper Details

Date Published: 1 July 1990
PDF: 1 pages
Proc. SPIE 1319, Optics in Complex Systems, (1 July 1990);
Show Author Affiliations
Tamara Gundel, Friedrich Schiller Univ. (Germany)
Friedrich Zollner, Friedrich Schiller Univ. (Germany)

Published in SPIE Proceedings Vol. 1319:
Optics in Complex Systems
F. Lanzl; H.-J. Preuss; G. Weigelt, Editor(s)

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