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Proceedings Paper

Telecentric, flat-field, anastigmatic, four-mirror optical system for lighographic camera
Author(s): Sung Chan Park; Sang-Soo Lee
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Paper Abstract

A telecentric flat field and anastigmatic four mirror optical camera system is developed for lithographic application. We have Obtained initially the analytic solutions of the four spherical mirror system free from four Seidel aberrations with reduction magnification (5x). However the systems obtained after corrections have still sizable amount of residual aberrations and small field. To overcome these shortcomings aspherization of the three mirrors is performed and it is found that it gives more improved performances.

Paper Details

Date Published: 1 July 1990
PDF: 1 pages
Proc. SPIE 1319, Optics in Complex Systems, (1 July 1990); doi: 10.1117/12.34892
Show Author Affiliations
Sung Chan Park, Korea Advanced Inst. of Science and Technology (South Korea)
Sang-Soo Lee, Korea Advanced Inst. of Science and Technology (South Korea)

Published in SPIE Proceedings Vol. 1319:
Optics in Complex Systems
F. Lanzl; H.-J. Preuss; G. Weigelt, Editor(s)

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