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Proceedings Paper

Dual-wavelength heterodyne interferometry for rough-surface measurements
Author(s): Edgar W. Fischer; Zoran Sodnik; Thomas Ittner; Hans J. Tiziani
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Paper Abstract

For interferometric topography measurements of optically rough surfaces dual wavelength heterodyne interferometry (DWHI) is a powerful tool. A DWHI system based on a two-wavelength HeNe laser and a matched grating technique is described. This set-Sup improves system stability and allows a simple heterodyne frequency generation. 1.

Paper Details

Date Published: 1 July 1990
PDF: 2 pages
Proc. SPIE 1319, Optics in Complex Systems, (1 July 1990); doi: 10.1117/12.34857
Show Author Affiliations
Edgar W. Fischer, Univ. Stuttgart (Germany)
Zoran Sodnik, Univ. Stuttgart (Germany)
Thomas Ittner, Univ. Stuttgart (Germany)
Hans J. Tiziani, Univ. Stuttgart (Germany)

Published in SPIE Proceedings Vol. 1319:
Optics in Complex Systems
F. Lanzl; H.-J. Preuss; G. Weigelt, Editor(s)

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