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Proceedings Paper

Periodic structure imaging by near-field microscopy
Author(s): Christian Pieralli; S. Leblanc; Alain Jalocha
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Paper Abstract

Two techniques of nearfield microscopy using external and internal reflections are presented and the influence of polarization is discussed in the case of periodic struc ture imaging.

Paper Details

Date Published: 1 July 1990
PDF: 1 pages
Proc. SPIE 1319, Optics in Complex Systems, (1 July 1990); doi: 10.1117/12.34814
Show Author Affiliations
Christian Pieralli, UFR Sciences et Techniques (France)
S. Leblanc, UFR Sciences et Techniques (France)
Alain Jalocha, UFR Sciences et Techniques (France)

Published in SPIE Proceedings Vol. 1319:
Optics in Complex Systems
F. Lanzl; H.-J. Preuss; G. Weigelt, Editor(s)

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