Proceedings Paper
Side-looking confocal microscope| Format | Member Price | Non-Member Price |
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Paper Abstract
We developed the Side Looking Confocal Microscope(SLCM) of which illmination axis and sensing axis are tilted from a perpendicular plane of an object. The standard confocal microscope has also an illmination source and a sensor which are situated on the same optical axis from an object. Its enterance angle is zero degrees. So in that case we can''t see 3-dimensional images -which are only bright field image- by means of standard confocal microscope method. SLCM which we developed is able to see 3-dimensional easily like a SEM image because of its angular illumination method.
Paper Details
Date Published: 1 July 1990
PDF: 2 pages
Proc. SPIE 1319, Optics in Complex Systems, (1 July 1990);
Published in SPIE Proceedings Vol. 1319:
Optics in Complex Systems
F. Lanzl; H.-J. Preuss; G. Weigelt, Editor(s)
PDF: 2 pages
Proc. SPIE 1319, Optics in Complex Systems, (1 July 1990);
Show Author Affiliations
Takahiro Ode, Lasertec Co. (Japan)
Satoshi Komiya, Lasertec Co. (Japan)
Satoshi Komiya, Lasertec Co. (Japan)
Y. Yamauchi, Lasertec Co. (Japan)
Daikichi Awamura, Lasertec Co. (Japan)
Daikichi Awamura, Lasertec Co. (Japan)
Published in SPIE Proceedings Vol. 1319:
Optics in Complex Systems
F. Lanzl; H.-J. Preuss; G. Weigelt, Editor(s)
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