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Proceedings Paper

New deep-UV microscope
Author(s): Naoya Eguchi; Michio Oka; Yutaka Imai; Masaki Saito; Shigeo R. Kubota
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Paper Abstract

We report a deep-UV microscope having the best resolution of any optical microscope. The resolution limit is less than 0.1 micron, which is close to the resolution limit of a scanning electron microscope (SEM). Moreover, measurement without vacuum chamber is possible using the new deep-UV microscope. The deep-UV microscope is suitable for inspecting semiconductors, magnetic heads and optical disks.

Paper Details

Date Published: 7 May 1999
PDF: 4 pages
Proc. SPIE 3740, Optical Engineering for Sensing and Nanotechnology (ICOSN '99), (7 May 1999); doi: 10.1117/12.347845
Show Author Affiliations
Naoya Eguchi, Sony Corp. (Japan)
Michio Oka, Sony Corp. (Japan)
Yutaka Imai, Sony Corp. (Japan)
Masaki Saito, Sony Precision Technology Inc. (Japan)
Shigeo R. Kubota, Sony Corp. (Japan)

Published in SPIE Proceedings Vol. 3740:
Optical Engineering for Sensing and Nanotechnology (ICOSN '99)
Ichirou Yamaguchi, Editor(s)

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