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Proceedings Paper

Fine OPC approach with gray-tone coding mask
Author(s): Jinglei Du; Jingqin Su; Qizhong Huang; Yixiao Zhang; Yongkang Guo; Chunlei Du; Zheng Cui
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Paper Abstract

In this paper, a new method has been proposed to realize fine OPC with gray-tone coding mask instead of gray-tone mask. The relationships of the gray-tone coding mask and gray-tone mask have been discussed, and OPC simulation results are given with the gray-tone coding mask.

Paper Details

Date Published: 7 May 1999
PDF: 4 pages
Proc. SPIE 3740, Optical Engineering for Sensing and Nanotechnology (ICOSN '99), (7 May 1999); doi: 10.1117/12.347834
Show Author Affiliations
Jinglei Du, Sichuan Univ. (China)
Jingqin Su, Sichuan Univ. (China)
Qizhong Huang, Sichuan Univ. (China)
Yixiao Zhang, Sichuan Univ. (China)
Yongkang Guo, Sichuan Univ. (China)
Chunlei Du, State Key Lab. of Optical Technologies for Microfabrication (China)
Zheng Cui, Rutherford Appleton Lab. (United Kingdom)

Published in SPIE Proceedings Vol. 3740:
Optical Engineering for Sensing and Nanotechnology (ICOSN '99)
Ichirou Yamaguchi, Editor(s)

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