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Proceedings Paper

Wavelength scanning confocal interference microscope for separate measurement of refractive index and geometrical thickness
Author(s): Takashi Fukano; Ichirou Yamaguchi
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Paper Abstract

We previously proposed a system based on a combination of a confocal microscope and a wavelength scanning heterodyne interferometer, for separate measurement of refractive index and geometrical thickness of lens and plates. However, we used two optical systems successively although they share the same optical system. In this paper, we propose a new measurement scheme which enable us to measure both the confocal profile and the optical path difference of the interferometer by single scanning of an object. We describe herE the measurement principle, the apparatus, signal processing means, and some experimental results.

Paper Details

Date Published: 7 May 1999
PDF: 4 pages
Proc. SPIE 3740, Optical Engineering for Sensing and Nanotechnology (ICOSN '99), (7 May 1999); doi: 10.1117/12.347819
Show Author Affiliations
Takashi Fukano, RIKEN--The Institute of Physical and Chemical Research and Saitama Univ. (Japan)
Ichirou Yamaguchi, RIKEN--The Institute of Physical and Chemical Research (Japan)


Published in SPIE Proceedings Vol. 3740:
Optical Engineering for Sensing and Nanotechnology (ICOSN '99)
Ichirou Yamaguchi, Editor(s)

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