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Proceedings Paper

Three-dimensional surface measurement using grating projection method by detecting phase and contrast
Author(s): Mitsuhiro Ishihara; Yasuo Nakazato; Hiromi Sasaki; Masahito Tonooka; Masayuki Yamamoto; Yukitoshi Otani; Toru Yoshizawa
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Paper Abstract

A grating projection method using a stereomicroscope is developed to provide a surface profile measurement. The phase shifting technique is applied for high accuracy detection of the projected fringe. To overcome 2(pi) phase jump caused by large step in height and to detect absolute height from the fringe number, contrast detection of the projected pattern is available. The contrast varies in relation with the distance between the sample and the objective lens. This variation is almost as same as optical sectioning that is usually used in confocal microscopy. The fast reconstruction procedure is proposed to analyze the focal point from a few images. This method is demonstrated and conformed to measure the steep surface profile of a test sample.

Paper Details

Date Published: 7 May 1999
PDF: 4 pages
Proc. SPIE 3740, Optical Engineering for Sensing and Nanotechnology (ICOSN '99), (7 May 1999); doi: 10.1117/12.347778
Show Author Affiliations
Mitsuhiro Ishihara, Takaoka Electric Manufacturing Co., Ltd. (Japan)
Yasuo Nakazato, Takaoka Electric Manufacturing Co., Ltd. (Japan)
Hiromi Sasaki, Takaoka Electric Manufacturing Co., Ltd. (Japan)
Masahito Tonooka, Tokyo Univ. of Agriculture and Technology (Japan)
Masayuki Yamamoto, Tokyo Univ. of Agriculture and Technology (Japan)
Yukitoshi Otani, Tokyo Univ. of Agriculture and Technology (Japan)
Toru Yoshizawa, Tokyo Univ. of Agriculture and Technology (Japan)


Published in SPIE Proceedings Vol. 3740:
Optical Engineering for Sensing and Nanotechnology (ICOSN '99)
Ichirou Yamaguchi, Editor(s)

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