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Proceedings Paper

Interferometry method for measuring head-disk spacing down to contact
Author(s): Xinqun Liu; Warwick W. Clegg; Bo Liu
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Paper Abstract

In this paper, we give a detailed analysis of the working principle, application limits, and potential problems of the intensity interferometry flying height testing, one of the most popularly used flying height testing techniques. Then, a phase-shift method is proposed to improve the sensitivity of this technique when the head-disk spacing is below 10 nm or near contact, based on manufacturing the glass testing disk to have a thickness within specified tolerances. Theoretical analysis and numerical evaluation are presented.

Paper Details

Date Published: 7 May 1999
PDF: 4 pages
Proc. SPIE 3740, Optical Engineering for Sensing and Nanotechnology (ICOSN '99), (7 May 1999); doi: 10.1117/12.347754
Show Author Affiliations
Xinqun Liu, Univ. of Plymouth (United Kingdom)
Warwick W. Clegg, Univ. of Plymouth (United Kingdom)
Bo Liu, National Univ. of Singapore (Singapore)

Published in SPIE Proceedings Vol. 3740:
Optical Engineering for Sensing and Nanotechnology (ICOSN '99)
Ichirou Yamaguchi, Editor(s)

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