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Proceedings Paper

Moire signals of circular gratings and its application to precise alignment
Author(s): Kazuhiro Hane; Toshio Goto; Shuzo Hattori
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Paper Abstract

The moire interference phenomenon caused by the circular diffraction gratings under coherent illumination is studied to utilize it for precise alignment. The phenomenon is investigated by the Fresnel Kirchhoff's diffraction theory. The characteristics of the moixe signals in the diffracted beams are examined as a function of the lateral displacement and the airgap between the gratings. The moire signal obtained in the first order diffracted beam has been employed to the precise short-range alignment. The alignment system consists of a phase shifted pair of circular gratings and a stage driven by piezo-electric atuators. The system is controlled by the micro-computer to keep the alignment position. The alignment has been carried out with the precision of few tens of nm.

Paper Details

Date Published: 1 July 1990
PDF: 2 pages
Proc. SPIE 1319, Optics in Complex Systems, (1 July 1990); doi: 10.1117/12.34719
Show Author Affiliations
Kazuhiro Hane, Nagoya University (Japan)
Toshio Goto, Nagoya University (Japan)
Shuzo Hattori, Nagoya Industrial Science Research Institute (Japan)

Published in SPIE Proceedings Vol. 1319:
Optics in Complex Systems
F. Lanzl; H.-J. Preuss; G. Weigelt, Editor(s)

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