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Proceedings Paper

Fast and efficient yield entitlement for 0.3-um technology production ramp-up
Author(s): Miguel Recio; Julian Moreno; Miguel Alonso Merino; Jose Angel Ayucar; Victorino Martin Santamaria; Agustin Godino
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Paper Abstract

Time to yield entitlement is known as one of the key issues for the new technology introduction and production ramp-up. The term 'entitlement' refers to the target where a technology achieves maturity, that is consistently good performance in terms of yield. Within this scope, we present the strategy followed to 'entitle' the 0.3 microns technology into our manufacturing line. Complementary approaches were simultaneously used to optimize the sped of the yield learning cycle: baseline yield analysis, a line monitor program and standard low yield failure analysis. The record times achieved for the yield entitlement have shown the efficiency of the approach. The paper gives the detail of the result obtained with each type of analysis and also how they were managed to implement corrective and preventive action plans in a fast way.

Paper Details

Date Published: 27 April 1999
PDF: 9 pages
Proc. SPIE 3743, In-Line Characterization, Yield Reliability, and Failure Analyses in Microelectronic Manufacturing, (27 April 1999); doi: 10.1117/12.346927
Show Author Affiliations
Miguel Recio, Lucent Technologies Microelectronica (Spain)
Julian Moreno, Lucent Technologies Microelectronica (Spain)
Miguel Alonso Merino, Lucent Technologies Microelectronica (Spain)
Jose Angel Ayucar, Lucent Technologies Microelectronica (Spain)
Victorino Martin Santamaria, Lucent Technologies Microelectronica (Spain)
Agustin Godino, Lucent Technologies Microelectronica (Spain)

Published in SPIE Proceedings Vol. 3743:
In-Line Characterization, Yield Reliability, and Failure Analyses in Microelectronic Manufacturing
Kostas Amberiadis; Gudrun Kissinger; Katsuya Okumura; Seshu Pabbisetty; Larg H. Weiland, Editor(s)

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