Share Email Print

Proceedings Paper

Membranes fabricated on a silicon support for the microsensors with the ultrasonic Lambda-type wave
Author(s): Jacek Golebiowski; Tadeusz Budzynski; Piotr B. Grabiec; Jerzy Jazwinski; Jan Koszur
Format Member Price Non-Member Price
PDF $17.00 $21.00

Paper Abstract

The construction of the microsensor with the ultrasonic wave Lambda-type as well as the conditions of the wave propagation were presented. The possibilities of the fabrication of multi-layer membranes on the silicon base using the microelectronics technologies were presented and discussed. The analysis of the usefulness of the processes mentioned to the production of the thin membrane sensors was carried out taking the intrinsic stresses into consideration. The summary of the experimental results was done and the most useful parameters of the membrane ultrasonic sensors were pointed out.

Paper Details

Date Published: 30 April 1999
PDF: 5 pages
Proc. SPIE 3730, Optoelectronic and Electronic Sensors III, (30 April 1999);
Show Author Affiliations
Jacek Golebiowski, Technical Univ. of Lodz (Poland)
Tadeusz Budzynski, Institute of Electron Technology (Poland)
Piotr B. Grabiec, Institute of Electron Technology (Poland)
Jerzy Jazwinski, Institute of Electron Technology (Poland)
Jan Koszur, Institute of Electron Technology (Poland)

Published in SPIE Proceedings Vol. 3730:
Optoelectronic and Electronic Sensors III
Antoni Nowakowski; Bogdan Chachulski, Editor(s)

© SPIE. Terms of Use
Back to Top
Sign in to read the full article
Create a free SPIE account to get access to
premium articles and original research
Forgot your username?