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Proceedings Paper

Preparation and characterization of Er-doped SiO2-TiO2-Al2O3 planar waveguides by sol-gel process for integrated optical amplifiers
Author(s): Qing Xiang; Yan Zhou; Yee Loy Lam; Yuen Chuen Chan; Chan Hin Kam
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Paper Abstract

Silica based planar waveguides co-doped with Er3+, TiO2 and Al2O3 have been fabricated on SOS (silica on silicon) by a sol-gel process using multiple spin-coating and rapid thermal processing (RTP). Their characteristics, such as refractive index, thickness photoluminescence (PL), FTIR (Furior Transform infrared spectrum), XRD (X-ray diffraction), and surface roughness are investigated. The relatively strong PL emitted from planar waveguide has been got using the recipe of 93SiO2:7TiO2:10Al2O3:0.5Er2O3 (mole ratio). The presence of O2 during annealing in RTP is indispensable for sol-gel waveguide to guide light. Both the average refractive index and thickness of multilayer film increase as the layer number increases.

Paper Details

Date Published: 1 April 1999
PDF: 6 pages
Proc. SPIE 3622, Rare-Earth-Doped Materials and Devices III, (1 April 1999); doi: 10.1117/12.344500
Show Author Affiliations
Qing Xiang, Nanyang Technological Univ. (Singapore)
Yan Zhou, Nanyang Technological Univ. (Singapore)
Yee Loy Lam, Nanyang Technological Univ. (Singapore)
Yuen Chuen Chan, Nanyang Technological Univ. (Singapore)
Chan Hin Kam, Nanyang Technological Univ. (Singapore)

Published in SPIE Proceedings Vol. 3622:
Rare-Earth-Doped Materials and Devices III
Shibin Jiang; Seppo Honkanen, Editor(s)

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