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Proceedings Paper

Laser damage of optical coatings from UV to deep UV at 193 nm
Author(s): Jean Dijon; Etienne Quesnel; Catherine Pelle; Roland Thielsch
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Paper Abstract

Scanning electron microscope observations off damaged coatings from 355nm to 193nm are reported. From these results it appears that oxide based coating are strongly limited at 193nm while they performed very well at the other wavelength. Damages occurs at the coating surface for oxides while they concern both surface and substrate interfaces with fluoride base coatings. While fluorides have a better threshold than oxide at 193nm they are limited by localized defects. The ability to overcome this limitation with ion beam sputtering fluoride material at 193nm starting from results at 355nm.

Paper Details

Date Published: 7 April 1999
PDF: 10 pages
Proc. SPIE 3578, Laser-Induced Damage in Optical Materials: 1998, (7 April 1999); doi: 10.1117/12.344439
Show Author Affiliations
Jean Dijon, CEA-LETI (France)
Etienne Quesnel, CEA-LETI (France)
Catherine Pelle, CEA-LETI (France)
Roland Thielsch, Fraunhofer-Institut fuer Angewandte Optik und Feinmechanik (Germany)

Published in SPIE Proceedings Vol. 3578:
Laser-Induced Damage in Optical Materials: 1998
Gregory J. Exarhos; Arthur H. Guenther; Mark R. Kozlowski; Keith L. Lewis; M. J. Soileau, Editor(s)

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