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Proceedings Paper

Measurement and analysis of compaction in fused silica
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Paper Abstract

Laser irradiation of fused silica produces compaction. Irradiation at photolithographic wavelengths of 248nm or 193nm produces density increase of order parts per millon. While these changes are small, the accompanying increase in index of refraction may be large enough to degrade the performance of photolithographic exposure optics. This paper reports experimental of compaction by interferometry and theoretical analysis of the elastic response of the glass samples to extract the sample-independent unconstrained compaction. The power law behavior of compaction vs. exposure dose is presented, along with a Monte Carlo analysis of error bars on this curve.

Paper Details

Date Published: 7 April 1999
PDF: 12 pages
Proc. SPIE 3578, Laser-Induced Damage in Optical Materials: 1998, (7 April 1999); doi: 10.1117/12.344433
Show Author Affiliations
Douglas C. Allan, Corning Inc. (United States)
Charlene M. Smith, Corning Inc. (United States)
Nicholas F. Borrelli, Corning Inc. (United States)

Published in SPIE Proceedings Vol. 3578:
Laser-Induced Damage in Optical Materials: 1998
Gregory J. Exarhos; Arthur H. Guenther; Mark R. Kozlowski; Keith L. Lewis; M. J. Soileau, Editor(s)

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