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Proceedings Paper

Measurement of scatter from PSL standard spheres deposited on disk surfaces
Author(s): Craig A. Scheer; John C. Stover
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Paper Abstract

Accurately sized PSL spheres of several diameters are deposited on disks. Scatter from the depositions is measured and compared to the results of a model for surface bound particles. The results are important for two reasons. The measurements will help provide an early database for determining the smallest detectable particles for a given disk texture. Secondly, the use of these particular PSL spheres, which have been accurately sized to about 1% of their diameter, will be important for establishing particle standards for the disk industry.

Paper Details

Date Published: 29 March 1999
PDF: 8 pages
Proc. SPIE 3619, Surface Characterization for Computer Disks, Wafers, and Flat Panel Displays, (29 March 1999);
Show Author Affiliations
Craig A. Scheer, ADE Optical Systems (United States)
John C. Stover, ADE Optical Systems (United States)


Published in SPIE Proceedings Vol. 3619:
Surface Characterization for Computer Disks, Wafers, and Flat Panel Displays
John C. Stover, Editor(s)

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