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Proceedings Paper

Linear and nonlinear optical properties of silicon micro- and nanocrystallites
Author(s): Dmitri Milovzorov; Takao Inokuma; Yoshihiro Kurata; Seiichi Hasegawa; Takanori Suzuki
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Paper Abstract

Silicon crystallites produced by low temperature plasma- enhanced chemical vapor deposition technique have been shown size-dependent photoluminescent and second harmonic generation responses. The crystalline volume fraction was estimated by using Raman spectra. The grain sizes of crystallites were measured by using x-ray diffraction. The structural chemical properties of poly-Si films were studied by means of Fourier-transform infrared spectroscopy and transmission spectrophotometry. The size- and shape- dependent second-harmonic generation of poly-Si films is, also, studied. The second-harmonic generation intensity for poly-Si deposited by using SiH4/SiF4/H2 gas mixture as function of such deposition conditions as hydrogen flow rate, silicon tetrafluoride flow rate, deposition temperature was studied.

Paper Details

Date Published: 15 March 1999
PDF: 9 pages
Proc. SPIE 3734, ICONO '98: Fundamental Aspects of Laser-Matter Interaction and New Nonlinear Optical Materials and Physics of Low-Dimensional Structures, (15 March 1999); doi: 10.1117/12.342366
Show Author Affiliations
Dmitri Milovzorov, Institute of Radio Engineering (Russa) and RIKEN--The Institute of Physical and Chemical Research (Japan)
Takao Inokuma, Kanazawa Univ. (Japan)
Yoshihiro Kurata, Kanazawa Univ. (Japan)
Seiichi Hasegawa, Kanazawa Univ. (Japan)
Takanori Suzuki, RIKEN--The Institute of Physical and Chemical Research (Japan)


Published in SPIE Proceedings Vol. 3734:
ICONO '98: Fundamental Aspects of Laser-Matter Interaction and New Nonlinear Optical Materials and Physics of Low-Dimensional Structures
Konstantin N. Drabovich; V. I. Emelyanova; Vladimir A. Makarov, Editor(s)

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