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Proceedings Paper

High-spatial-frequency grating technology for microsystem applications
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Paper Abstract

A sub-micron grating can be the key miniaturized planar element in Micro-opto-electromechanical systems where it performs a number of optical functions such as light routing, beam splitting, spectral-analysis, polarization filtering, beam recombination, spatial resonance excitation, in the domains of displacement measurement, biochemical sensors, environment monitoring, laser emission control, WDM communications, to quote a few current applications. This paper will describe the main stream technology of sub-micron gratings and illustrate its application potential.

Paper Details

Date Published: 10 March 1999
PDF: 5 pages
Proc. SPIE 3680, Design, Test, and Microfabrication of MEMS and MOEMS, (10 March 1999); doi: 10.1117/12.341255
Show Author Affiliations
Olivier M. Parriaux, Univ. Jean-Monnet (France)
Florent Pigeon, Univ. Jean-Monnet (France)
Y. Jourlin, Univ. Jean-Monnet (France)
Alain Mure-Ravaud, Univ. Jean-Monnet (France)
Alexandre V. Tishchenko, General Physics Institute (France)

Published in SPIE Proceedings Vol. 3680:
Design, Test, and Microfabrication of MEMS and MOEMS
Bernard Courtois; Wolfgang Ehrfeld; Selden B. Crary; Wolfgang Ehrfeld; Hiroyuki Fujita; Jean Michel Karam; Karen W. Markus, Editor(s)

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