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Proceedings Paper

Fabrication of multi-air gap InP-based microstructures for widely tunable optical filters
Author(s): Alain Spisser; Philippe Regreny; Christian Seassal; Jean Louis Leclercq; Pierre Viktorovitch
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Paper Abstract

InP-based microstructuring optimization is presented in order to develop the fabrication of highly selective and widely tunable optical filter for WDM applications. Technological constraints such as etching selectivity, etching anisotropy, sticking phenomena and residual stress are listed and their respective practical solutions are demonstrated. Opto-electro-mechanical simulations combined with this technological 'know how' have yielded to the fabrication of 8 air gaps InP-based microstructures suitable for production of optical filter demonstrators.

Paper Details

Date Published: 10 March 1999
PDF: 10 pages
Proc. SPIE 3680, Design, Test, and Microfabrication of MEMS and MOEMS, (10 March 1999); doi: 10.1117/12.341253
Show Author Affiliations
Alain Spisser, LEOM/Ecole Central de Lyon (France)
Philippe Regreny, LEOM/Ecole Central de Lyon (France)
Christian Seassal, LEOM/Ecole Central de Lyon (France)
Jean Louis Leclercq, LEOM/Ecole Central de Lyon (France)
Pierre Viktorovitch, LEOM/Ecole Central de Lyon (France)

Published in SPIE Proceedings Vol. 3680:
Design, Test, and Microfabrication of MEMS and MOEMS
Bernard Courtois; Wolfgang Ehrfeld; Selden B. Crary; Wolfgang Ehrfeld; Hiroyuki Fujita; Jean Michel Karam; Karen W. Markus, Editor(s)

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