Laser stereolithography deals with the manufacture of 3D objects that are made by space-resolved laser-induced polymerization. In order to obtain 3D micro-objects, we developed a new microstereolithography apparatus based on the use of a dynamic mask generator which allows the manufacture of a complete layer by only one irradiation, the part being manufactured layer by layer. This process is compared of a broad-band visible light source, that leads to the elimination of speckle effects resulting from the conventional use of a laser beam, and of a liquid crystal display as the dynamic mask generator. A lateral resolution of 2 micrometers has been demonstrated, and some examples of high aspect ratio micro-objects are presented.

Date Published: 10 March 1999
PDF: 9 pages
Proc. SPIE 3680, Design, Test, and Microfabrication of MEMS and MOEMS, (10 March 1999); doi: 10.1117/12.341246

Published in SPIE Proceedings Vol. 3680:
Design, Test, and Microfabrication of MEMS and MOEMS
Bernard Courtois; Wolfgang Ehrfeld; Selden B. Crary; Wolfgang Ehrfeld; Hiroyuki Fujita; Jean Michel Karam; Karen W. Markus, Editor(s)