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Proceedings Paper

Production of novel 3D microstructures using excimer laser mask projection techniques
Author(s): Nadeem Hasan Rizvi
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Paper Abstract

Excimer laser ablation is used in conjunction with mask projection techniques to produce novel and complex microstructures. Special multiple-mask techniques have been developed which, together with synchronized workpiece motion and laser firing, are used for the manufacture of features such as micro-channels, ramps, contoured surfaces with channels etc. These new techniques allow planar microstructures to be combined and superimposed onto curved or multifaceted shapes, thereby enabling hitherto unobtainable structures to be produced. Details are given of the techniques used along with examples of the types of structures which have been produced.

Paper Details

Date Published: 10 March 1999
PDF: 7 pages
Proc. SPIE 3680, Design, Test, and Microfabrication of MEMS and MOEMS, (10 March 1999); doi: 10.1117/12.341245
Show Author Affiliations
Nadeem Hasan Rizvi, Exitech Ltd. (United Kingdom)

Published in SPIE Proceedings Vol. 3680:
Design, Test, and Microfabrication of MEMS and MOEMS
Bernard Courtois; Wolfgang Ehrfeld; Selden B. Crary; Wolfgang Ehrfeld; Hiroyuki Fujita; Jean Michel Karam; Karen W. Markus, Editor(s)

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