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Proceedings Paper

Automatic evaluation of a sensor's geometrical parameters
Author(s): Jean Philippe Blanc; Marc Belleville; Fabien Mieyeville; Hubert Bono
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Paper Abstract

This paper deals with a method aimed to automatically determine the parameters of a sensor in order to reach the end user's functional specifications. This general method, based on a behavioral modeling of the sensor, and on analog simulations and optimizations, has been setup and validated for a capacitive pressure sensor. The tools used are standard Microelectronics IC CAD tools. Four different steps are necessary to reach an optimal set of parameters. Considering a new family of sensor, the first step defines the different types of analog simulations that will allow a good decoupling between the sensor parameters. Next, for every new sensor specification, a first set of simulations is used to get realistic initial values for the main parameters. Then a first optimization, is performed, considering worst-case technological conditions. This method has been validated using two realistic and different functional specifications; the optimization results are in good agreement with the previously manufactured devices.

Paper Details

Date Published: 10 March 1999
PDF: 9 pages
Proc. SPIE 3680, Design, Test, and Microfabrication of MEMS and MOEMS, (10 March 1999); doi: 10.1117/12.341244
Show Author Affiliations
Jean Philippe Blanc, CEA-LETI (France)
Marc Belleville, CEA-LETI (France)
Fabien Mieyeville, Ecole Centrale de Lyon (France)
Hubert Bono, TRONIC'S (France)

Published in SPIE Proceedings Vol. 3680:
Design, Test, and Microfabrication of MEMS and MOEMS
Bernard Courtois; Wolfgang Ehrfeld; Selden B. Crary; Wolfgang Ehrfeld; Hiroyuki Fujita; Jean Michel Karam; Karen W. Markus, Editor(s)

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