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Proceedings Paper

Examples of MEMS technologies resulting in industrial transfers
Author(s): Jean-Sebastian Danel; Michel Borel; Marie-Therese Delaye; Bernard Diem; Hubert Grange; France Michel; Patrice Rey; Sylvie Viollet-Bosson
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Paper Abstract

We present here three technological processes developed by LETI which have resulted in successful industrial transfers for MEMS.

Paper Details

Date Published: 10 March 1999
PDF: 11 pages
Proc. SPIE 3680, Design, Test, and Microfabrication of MEMS and MOEMS, (10 March 1999); doi: 10.1117/12.341238
Show Author Affiliations
Jean-Sebastian Danel, CEA-LETI (France)
Michel Borel, CEA-LETI (France)
Marie-Therese Delaye, CEA-LETI (France)
Bernard Diem, CEA-LETI (France)
Hubert Grange, CEA-LETI (France)
France Michel, CEA-LETI (France)
Patrice Rey, CEA-LETI (France)
Sylvie Viollet-Bosson, CEA-LETI (France)

Published in SPIE Proceedings Vol. 3680:
Design, Test, and Microfabrication of MEMS and MOEMS
Bernard Courtois; Wolfgang Ehrfeld; Selden B. Crary; Wolfgang Ehrfeld; Hiroyuki Fujita; Jean Michel Karam; Karen W. Markus, Editor(s)

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