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Proceedings Paper

From circuit to microsystems: using a transformer-equivalent circuit to study a piezoelectric actuator
Author(s): F. Oms-Elisabelar; Christian Bergaud; L. Nicu
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Paper Abstract

A transformer equivalent circuit is used to represent a piezo-actuator. The circuit is developed starting from electromechanical transduction principles and included in SPICE software. The actuator is a length-expanded cantilever. Analytical and simulated results are compared and found in god agreement both in static and dynamic studies.

Paper Details

Date Published: 10 March 1999
PDF: 8 pages
Proc. SPIE 3680, Design, Test, and Microfabrication of MEMS and MOEMS, (10 March 1999); doi: 10.1117/12.341228
Show Author Affiliations
F. Oms-Elisabelar, LAAS-CNRS (France)
Christian Bergaud, LAAS-CNRS (France)
L. Nicu, LAAS-CNRS (France)


Published in SPIE Proceedings Vol. 3680:
Design, Test, and Microfabrication of MEMS and MOEMS
Bernard Courtois; Wolfgang Ehrfeld; Selden B. Crary; Wolfgang Ehrfeld; Hiroyuki Fujita; Jean Michel Karam; Karen W. Markus, Editor(s)

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